Defects in transistors, such as unwanted impurities and broken chemical bonds in the various layers of the semiconductor, can limit their performance and reliability. These defects are becoming harder ...

Defect engineering is the deliberate introduction, removal, or manipulation of structural imperfections in nanomaterials to tailor their properties for specific applications. Unlike the traditional ...

As device sizes continue to increase on devices at 2x nm design rule and beyond and high wafer stress is worsening due to multi-film stacking in the vertical memory process, we observe an increasing ...