Inspecting subwavelength defects in dense nanopatterns is hindered by weak signals and strong background noise. Researchers ...
Researchers from Cornell University, TSMC, and ASM used electron ptychography for atomic-scale defect inspection of transistors. The computational imaging method uses an extremely precise electron ...
Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...
Variation is becoming a bigger problem in multi-die assemblies with TSVs and hybrid bonding. Multi-modal approaches are required to test these devices. AI plays a role in improving defect capture rate ...
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